Material
|
Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
|
Chip size
|
3.4x1.6x0.3mm
|
Cantilever number
|
1 rectangular, tipless
|
Reflective side
|
Au
|
Type of colloidal spheres
|
SiO2/BSG
|
|
|
Sphere size
|
A - 5 um to 9 um
|
Available sizes of BSG spheres (SiO2 spheres available only with A size)
|
B - 10 um to 14 um
C - 20 um or more
|
Cantilever length, L±10µm |
Cantilever width, W±6µm
|
Cantilever thickness,
T±0.5 µm
|
Resonant frequency, kHz
|
Force constant, N/m
|
||||
min
|
typical
|
max
|
min
|
typical
|
max
|
|||
125
|
30
|
4.0
|
200
|
300
|
400
|
13
|
37
|
77
|