ETALON is a new series of excellent composite AFM probes.
| Material |
Polysilicon lever,
monocrystal silicon tip
|
| Chip size | 3.6 x 1.6 x 0.4 mm |
|
Reflective side Tip side |
Au (20-30 nm) Highly doped diamond (~100nm thickness), doping level: 6’000-8’000ppm B. |
| Cantilever number | 2 rectangular |
| Tip shape | Octahedral at the base, conic on the last 200 nm |
| Tip cone angle φ | 30 degrees on the last 200 nm |
| Full tip height | ≥10 µm |
| Pedestal/tip ratio | 1:1 |
| Tip curvature radius | ~100nm |
| Cantilever type | A | B | Typical dispersion |
| Length, L (µm) | 93 | 123 | ± 2 |
| Width, W (µm) | 34 | 34 | ± 3 |
| Thickness, H (µm) | 3 | 3 | ± 0.15 |
| Force Constant (N/m) | 34 | 17 | ±20% |
| Resonant frequency (kHz) | 380 | 230 | ± 10% |
