TGQ1

Test Grating TGQ1

Test grating TGQ1 is intended for:

simultaneous calibration in X, Y and Z directions;
lateral calibration of SPM scanners;
detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.

Grating description
Structure	- Si wafer - the grating is formed on the layer of SiO2
Pattern types	3-Dimensional array of small rectangles
Period	3.0±0,05 µm
Height	20nm ±1,5 nm*
Rectangles side size:	1,5±0,35 µm
Chip size	5x5x0,5 mm
Effective area	central square 3x3 mm

* the average meaning based on the measurements of 5 gratings (from the batch of 300 gratings) by SPM calibrated by PTB certified grating TGZ1. Basic step height can vary from the specified one within ±10% (for example step height can be 22±1.5nm)

Fig.1 SPM image of TGQ1 grating