| Grating set TGS1 |
Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 gratings TGZ1, TGZ2, TGZ3 with different step heights.
| Grating description | |
| Structure: | - Si wafer - the grating is formed on the layer of SiO2 |
| Pattern types: | 1- Dimensional (in Z-axis direction) |
| Step height: | TGZ1 - 20,0±1.5 nm* TGZ2 - 110±2 nm* TGZ3 - 520±3 nm* |
| Period: | 3±0,1 µm |
| Chip size: | 5x5x0,5 mm |
| Effective area: | central square 3x3 mm |
Fig.1 SEM photo of TGZ3 grating
* - the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)
