Image courtesy Dr.John Mamin, IBM Research Division
|
Test Grating TGT1 |
Test grating TGT1 is intended for:
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio), tip degradation and contamination control.
|
Grating description |
|
|
Structure: |
the grating is formed on Si wafer top surface |
|
Pattern types: |
array of sharp tips |
|
Tip angle: |
50±10 degrees (on the very tip end) |
|
Period: |
3±0,05µm |
|
Diagonal period: |
2,12µm |
|
Chip size: |
5x5x0,5mm |
|
Effective area: |
central square 2x2mm |
|
Height, h: |
0,25-0,5µm |
|
|
|
Fig.1 SEM images of TGT1 grating
Images courtesy Dr.John Mamin,
IBM Research Division
