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Test Grating TGX1 |
Test grating TGX1 is intended for:
lateral calibration of SPM scanners;
detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
determination of the tip aspect ratio.
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Grating description |
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Structure |
the grating is formed on Si wafer top surface |
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Pattern types |
chessboard-like array of square pillars with sharp undercut edges |
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Period |
3±0,05µm |
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Edge curvature radius |
less than 10nm |
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Chip size |
5x5x0,5mm |
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Effective area |
central square 3x3mm |
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Height |
0,6µm* |
* - the dimensions marked * are given for information only.
Fig.1 SPM image of TGX1 grating
