CSG10/Au

High Resolution CONTACT "GOLDEN" Silicon Cantilevers CSG10 series with Au conductive coating

CSG10/Au series specification

Material	Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
Chip size	3.4x1.6x0.3mm
Reflective side	Au
Conductive coating	Au (35nm), Ti (25A) adhesion layer
Cantilever number	1 rectangular
Tip curvature radius	~ 35nm
Also available coatings	conductive PtIr, TiN
Available CSG10 probe	bare, tipless, with Al reflective coating

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

CSG10

225

1.0

0.01

0.11

0.5