High Resolution CONTACT "GOLDEN" Silicon Cantilevers CSG10 series with Au conductive coating

 

CSG10/Au series specification

 

 

 

Material

Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped

Chip size

3.4x1.6x0.3mm

Reflective side

Au

Conductive coating

Au (35nm), Ti (25A) adhesion layer

Cantilever number

1 rectangular

Tip curvature radius

~ 35nm

Also available coatings

conductive PtIr, TiN

Available CSG10 probe 

bare, tipless, with Al reflective coating

   

 

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

CSG10

225

30

1.0

8

22

39

0.01

0.11

0.5

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