15 chips of High Resolution CONTACT "GOLDEN" Silicon Cantilevers CSG30 series Due to the medium meanings of force constant and resonant frequency the probes can be used in contact, semicontact and noncontact modes. |
CSG30 series specification |
|
|
Cantilever series |
Cantilever length, L±5µm |
Cantilever width, W±3µm |
Cantilever thickness, T±0.5 µm |
Resonant frequency, kHz |
Force constant, N/m |
||||
min |
typical |
max |
min |
typical |
max |
||||
CSG30 |
190 |
30 |
1.5 |
26 |
48 |
76 |
0.13 |
0.6 |
2 |