High Resolution NONCONTACT "GOLDEN" Silicon Cantilevers FMG01 series with TiN conductive coating

 

AFM cantilevers with TiN conductive coating well suit for a work in both conductive contact (Spreading resistance) and electrical semicontact (KPFM, EFM) modes.

Probes of this type:

  • offer perfect voltage stability (up to 6V) and wear resistance;
  • are well-conductive for work in Spreading resistance mode;
  • coated with reflective Au layer from the top side.

 

FMG01/TiN series specification:

 

Material

Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped

Chip size

3.4x1.6x0.3mm

Reflective side

Au

Tip side TiN

Cantilever number

1 rectangular

Tip curvature radius

25 - 35 nm

Available coatings

conductive PtIr, Au;

magnetic CoCr

Available probe

bare, tipless, with Al reflective coating

 

 

 

   

 

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

FMG01

225

32

2.5

40

60

96

1

3

5

 

 

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