NSG03/Pt

High Resolution NONCONTACT "GOLDEN" Silicon Cantilevers NSG03 series with PtIr conductive coating

NSG03/Pt series specification

Material	Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped
Chip size	3.4x1.6x0.3mm
Reflective side	PtIr
Conductive coating	PtIr (25nm), Cr adhesion layer (25A)
Cantilever number	1 rectangular
Tip curvature radius	~ 35nm
Also available coatings	conductive TiN, Au
Available NSG03 probe	bare, tipless, with Al reflective coating

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

NSG03

135

1.5

150

0.35

1.74

6.1